Design of silicon-based substrate integrated waveguide filters for high-frequency applications and Micro/Nano manufacturing technology analysis
Yiran Zhang
Jiangnan University
DOI: https://doi.org/10.59429/esta.v11i4.8464
Keywords: Silicon-based substrate integrated waveguide; Filter design; micro/nano manufacturing; Highfrequency applications; Millimeter-wave
Abstract
Silicon-based substrate integrated waveguide (SIW) filters are a new type of high-frequency filters, widely used in millimeter-wave and terahertz bands of high-frequency communication systems. This paper analyzes the design principles, micro/nano manufacturing technologies, and advantages of SIW filters in highfrequency applications. The basic concepts, electromagnetic properties, and design optimization methods of substrate integrated waveguides are discussed in detail, along with the application of micro/nano manufacturing technologies such as photolithography and electron beam lithography, which enhance the performance and miniaturization of the filters. Finally, the future development directions of novel silicon-based filters are outlined, and it is emphasized that the research of these filters will further drive the advancement of high-frequency communication technologies.
References
[1] FENG Z H, SUN X Y, HAN P B, et al.Microstructure and microhardness of a novel TiZrAlV alloy by laser gas nitriding at different laser powers[J].Chinese Journal of Rare Metals, 2020, 39: 270-278.
[2] LIU Q H, XU X J, GE X L, et al.Research of Laser Alloying Ti-Si-C Coating on TC4 Titanium Alloy[J].Chinese Journal of Rare Metals, 2016, 40(6): 546-551.
[3] HUANG K J, HUANG W X, LIN X, et al.Laser Alloying for Improvement of Oxidation Resistance at 1 000 ℃ of Ti5Si3/Ti3Al Composite Coating on TA2 Titanium Alloy[J].Aeronautical Manufacturing Technology, 2018, 61(23): 46-51.